Taiwan Semiconductor Research Institute (TSRI), National Applied Research Laboratories (NARLabs)- leads academic and research sectors to propel semiconductor technologies and applications. The Non-Invasive Gas Sensor is one of their projects aiming at detection of TVOC level from one’s breath to identify diseases.
The used of composite metal oxide materials combined with micro-electromechanical structure, also nanomaterials with microstructure processes, there are can enhance the sensor’s stability and detection ability from exhaled breath.
Additionally, merge elasticity packaging as 2.5D/3D CoCoP integrates sensing and interface circuit to create a highly integrated sensing chip module with advantages such as small size and lower power consumption for heterogeneous integrated packaging technology.
